发明名称 |
SUBSTRATE HEATING DEVICE |
摘要 |
<p>A substrate heating device comprises a heating chamber, and a heating unit, and a suspending and fixing unit both disposed in the heating chamber. The heating unit is disposed at the bottom of the heating chamber. The suspending and fixing unit is used for fixing the substrate above the heating unit in a suspended manner. By using the device, collision and friction to the substrate are avoided, thereby ensuring that the substrate is heated uniformly.</p> |
申请公布号 |
WO2014172988(A1) |
申请公布日期 |
2014.10.30 |
申请号 |
WO2013CN77954 |
申请日期 |
2013.06.26 |
申请人 |
BOE TECHNOLOGY GROUP CO., LTD.;BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. |
发明人 |
JIAO, YU;WANG, YANMING;YAO, QINGYANG;LIU, JIE |
分类号 |
F26B21/02;F26B21/00;G03F7/38 |
主分类号 |
F26B21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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