FLOW CONTROLLER AND OPERATION ORIGIN CORRECTION METHOD OF STEPPING MOTOR

摘要

PROBLEM TO BE SOLVED: To provide a flow controller capable of controlling variation in flow rate of a fluid even when the position of a hall element varies.SOLUTION: A flow controller 1 includes a valve unit 2 for adjusting the flow rate of a fluid by rotating a valve body 10 enclosed in a valve case 3 with a stepping motor 20. The valve unit 2 has a valve body rotation stop means 30 for stopping the rotation of the valve body 10. The valve body rotation stop means 30 is formed so as to stop the rotation of a valve body 10 at a position of a predetermined angle past a position as an operation origin of the stepping motor 20. The flow controller 1 corrects the operation origin in a range of the position of the operation origin to a position where the valve body 10 is stopped by the valve body rotation stop means 30 based on that rotation of the valve body 10.