| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a susceptor which can be prevented from being cracked by rapid heating and mechanical strength reduction caused by enlargement, and a vapor phase growth device employing the same.SOLUTION: The susceptor comprises a hole in a center part and a hole for housing a substrate holder in a peripheral part. The susceptor is formed by providing, between the hole in the center part and an outer edge, a slit for preventing contact with the hole for housing the substrate holder. A vapor phase growth device comprises: the susceptor for housing the substrate holder; a heater disposed on a surface opposing the susceptor for heating a substrate; a reactor formed from a gap between the susceptor and the counter surface of the susceptor; a raw material gas introduction part for supplying raw material gas to the reactor; and a reaction gas exhaustion part. The vapor phase growth device employs the susceptor.</p> |
