RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN

摘要

A resist composition including a base component which exhibits changed solubility in a developing solution under action of acid and an acid generator which generates acid upon exposure, the base component containing a polymeric compound containing a structural unit represented by general formula (a0-1) and the acid generator containing a compound represented by general formula (b1). In the formulae, R represents H, an alkyl group of C1 to 5 or a halogenated alkyl group of C1 to 5; Ya1 represents a single bond or a divalent linking group; La1 and La2 represents —SO2— or —C(═O)—; Ra1 represents a cyclic group which may have a substituent and the like; n1 and n2 represents 0 or 1; R11 represents a cyclic group of C5 to 30 which may have a substituent; V11 represents a single bond or an alkylene group of C1 to 6; L11 represents an ester bond; Y11 represents an alkylene group of C1 to 5 which may have a fluorine atom; m represents an integer of 1 or more; and Mm+ represents an organic cation having a valency of m.;

主权项

1. A resist composition comprising a base component (A) which exhibits changed solubility in a developing solution under action of acid and an acid generator component (B) which generates acid upon exposure,
the base component (A) comprising a polymeric compound (A1) comprising a structural unit (a0) represented by general formula (a0-1) shown below, and the acid generator component (B) comprising a compound (B1) represented by general formula (b1) shown below: wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; Ya1 represents a single bond or a divalent linking group; La1 and La2 each independently represents —SO2— or —C(═O)—; Ra1 represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent or a chain-like alkenyl group which may have a substituent; n1 and n2 each independently represents 0 or 1, and at least one of n1 and n2 is 1, provided that, when La1 is —SO2— and n1 is 1, n2 is 1, and when La2 is —SO2— and n2 is 1, Ya1 is a chain-like divalent linking group; R11 represents a cyclic group of 5 to 30 carbon atoms which may have a substituent; V11 represents a single bond or an alkylene group of 1 to 6 carbon atoms; L11 represents an ester bond; Y11 represents an alkylene group of 1 to 5 carbon atoms which may have a fluorine atom; m represents an integer of 1 or more; and Mm+ represents an organic cation having a valency of m.