SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES

摘要

A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.

主权项

1. A system for assessing structures formed by microfabrication processes and the microfabrication processes themselves comprising:
an imaging system comprising a camera and illumination for obtaining 2D images of a structure at multiple focal positions to substantially characterize both 2D and 3D geometries of the structure; a mechatronic support for moving the substrate relative to the imaging system to address a field of view of the camera to a structure; a controller coupled to the imaging system and to the mechatronic support for coordinating the operation thereof and for receiving images from the imaging system, for forming a concatenated image from the received images, and for identifying features of the structure in the concatenated image that are indicative of the operation of a microfabrication tool.