CHARGED PARTICLE MICROSCOPE APPARATUS AND IMAGE ACQUISITION METHOD OF CHARGED PARTICLE MICROSCOPE APPARATUS

摘要

A charged particle microscope apparatus includes a radiation optical system that radiates a focused charged particle beam to an upper side of a sample provided with a pattern and scans the sample; a detection optical system that detects charged particles generated from the sample to which the charged particle beam has been radiated by the radiation optical system; and a processing unit that processes the charged particles detected by the detection optical system to obtain a charged particle image of the sample, estimates diffusion of the charged particles at any depth of the pattern of the sample, on the basis of information on a depth or a material of the pattern of the sample or radiation energy of the charged particle beam in the radiation optical system; corrects the obtained charged particle image using the estimated diffusion of the charged particles; and processes the corrected charged particle image.

主权项

1. A charged particle microscope apparatus comprising:
a radiation optical system that radiates a focused charged particle beam to an upper side of a sample provided with a pattern and scans the sample with the charged particle beam; a detection optical system that detects charged particles generated from the sample to which the charged particle beam has been radiated by the radiation optical system; and a processing unit that processes the charged particles detected by the detection optical system to obtain a charged particle image of the sample, estimates diffusion of the charged particles at any depth of the pattern of the sample on the basis of information on a depth or a material of the pattern of the sample or information on radiation energy of the charged particle beam in the radiation optical system, corrects the obtained charged particle image using the estimated diffusion of the charged particles, and processes the corrected charged particle image.