| 摘要 |
This sample-holding tool is equipped with: a substrate which is made of an aluminum nitride-based ceramic and which has a sample-holding surface on the outer surface; and a conductor which is provided in the inside of the substrate and which is opposed to the sample-holding surface. In a zone that is present in the inside of the substrate and that lies between the conductor and the sample-holding surface, the oxygen content of the ceramic in a region located inside the outer circumference of the conductor is lower than that in a region located outside the outer circumference thereof. |
