METHOD AND APPARATUS OF SHEARED GUIDING PATTERNS

摘要

PROBLEM TO BE SOLVED: To relieve system design constraints by increasing flexibility and sweep capability using deliberate non-monodispersity of block-copolymer mixtures.SOLUTION: The embodiments disclose a method including: depositing a resist layer using a mixture of several different length polymer string materials spanning a range of natural periodicity; and imprinting the mixture of several different length polymer strings using sheared guiding patterns to increase flexibility.