| 发明名称 |
FORCE DETECTION DEVICE, AND FORCE TRANSDUCER DEVICE |
| 摘要 |
A force detection device includes a diamond piezoresistor including a highly orientated diamond into which boron is introduced as an impurity. The absolute value of the piezoresistance coefficient of the diamond piezoresistor is greater than the absolute value of a piezoresistance coefficient π11 or π12 in a case in which a major axis is in the <100> direction. |
| 申请公布号 |
US2014319538(A1) |
申请公布日期 |
2014.10.30 |
| 申请号 |
US201414220093 |
申请日期 |
2014.03.19 |
| 申请人 |
YOKOGAWA ELECTRIC CORPORATION |
发明人 |
TAKENAKA Kazuma |
| 分类号 |
H01L29/84;H01L29/16 |
主分类号 |
H01L29/84 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A force detection device comprising a diamond piezoresistor including a highly orientated diamond into which boron is introduced as an impurity,
wherein an absolute value of the piezoresistance coefficient of the diamond piezoresistor is greater than an absolute value of a piezoresistance coefficient π11 or π12 in a case in which a major axis is in a <100> direction. |
| 地址 |
Tokyo JP |
