Shape Measuring Apparatus

摘要

A shape measuring apparatus (1) measures a workpiece shape utilizing white light interference, and includes a stage (10) on which a workpiece (W) is placed, an interference optical system (100) that irradiates the workpiece (W) with white light (WL) to generate a white light interference moire, a drive unit (26) that moves one of the stage and the interference optical system in a direction of an optical axis, a length measuring device (50) that measures a relative distance (L) between the stage and the interference optical system changed by the drive unit, and an imaging unit (40) that images the white light interference moire to acquire contrast information of the white light interference moire that changes according to the relative distance.

主权项

1. A shape measuring apparatus that measures a workpiece shape by using white light interference, the apparatus comprising:
a stage on which the workpiece is placed; an interference optical system that irradiates the workpiece with white light to thereby generate a white light interference moire; a drive unit that moves a position of one of the stage and the interference optical system in a direction of an optical axis; a length measuring device that measures a relative distance between the stage and the interference optical system, the relative distance being changed by the drive unit upon moving the stage or the interference optical system; and an imaging unit that images the white light interference moire to acquire contrast information of the white light interference moire that changes according to the relative distance.