| 摘要 |
<p>Provided is a 3D shape measurement apparatus that can obtain a phase delay distribution image of an object to be measured from a single image and has simple optics. The 3D shape measurement apparatus 1 includes a coherent light source 10, a random phase modulation optical system 11, a mount 12, a Fourier transform optical system 13, an image pickup device 14, and an operation part 15. The random phase modulation optical system 11 two-dimensionally and randomly phase-modulates the coherent light to produce two-dimensionally and randomly phase-modulated flat light. The Fourier transform optical system 13 optically Fourier-transforms the light having passed through the object 16 to be measured to generate a light intensity distribution image. The image pickup device 14 takes the light intensity distribution image. The operation part 15 computes phase information on the object 16 to be measured from the taken light intensity distribution image. The operation part 15 further calculates a 3D shape of the object 16 to be measured from the phase information.</p> |
