发明名称 A METHOD OF MANUFACTURING A MEMS MICRO-MIRROR ASSEMBLY
摘要 A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirror assembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400).
申请公布号 SG11201405398W(A) 申请公布日期 2014.10.30
申请号 SG11201405398W 申请日期 2013.02.21
申请人 INTEL CORPORATION 发明人 KHECHANA, FAOUZI;ABELÉ, NICOLAS
分类号 G02B26/08;B81C3/00 主分类号 G02B26/08
代理机构 代理人
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