EVALUATION METHOD OF RESISTANCE CHANGE ELEMENT, EVALUATION APPARATUS, INSPECTION DEVICE, AND NON-VOLATILE STORAGE

摘要

PROBLEM TO BE SOLVED: To provide an evaluation method of a resistance change element suitable for quantitatively comprehending resistance change characteristics.SOLUTION: A resistance change element includes: a first electrode; a second electrode; and a resistance change layer in which a local area is formed between the first electrode and the second electrode, where the resistive state changes reversibly according to an electric pulse given across the first electrode and the second electrode. The evaluation method of the resistance change element includes: an acquisition step (S221) to acquire measured values representing the resistive state after the respective changes by changing the resistive state of the local area plural times; and a determination step (S230) to determine by calculating evaluation amount of physical parameters relevant to the structural characteristics of the local area based on the distribution of the acquired measured values.