MEMS PRESSURE SENSORS WITH INTEGRATED BAFFLES

摘要

A pressure sensor system may sense the pressure of a gas or liquid. The system may include a housing that has an entry port for the gas or liquid; a pressure sensor within the housing; and a baffle positioned between the entry port and the pressure sensor. The baffle may have one or more inlets oriented to receive gas or liquid that enters the entry port; one or more outlets oriented to deliver the received gas or liquid to the pressure sensor; and one or more sealed flow channels that prevent the gas or liquid from escaping from the baffle, other than through the one or more outlets. At least one of the outlets may be located within no more than one millimeter of a location on the pressure sensor. The pressure sensor and baffle may be made at the same time during a process of depositing, pattering, etching, wafer bonding, and/or wafer thinning a series of layers using microelectromechanical systems (MEMS) technology.

主权项

1. A pressure sensor system for sensing the pressure of a gas or liquid comprising:
a housing having an entry port for the gas or liquid; a pressure sensor within the housing; and a baffle positioned between the entry port and the pressure sensor, the baffle having:
one or more inlets oriented to receive gas or liquid that enters the entry port;one or more outlets oriented to deliver the received gas or liquid to pressure sensor; andone or more sealed flow channels that prevent the gas or liquid from escaping from the baffle, other than through the one or more outlets,at least one of the outlets being located within no more than one millimeter of a location on the pressure sensor.