PROCESS AND APPARATUS FOR PREPARATION OF OCTACHLOROTRISILANE
摘要
The invention relates to a process and an apparatus for controlled preparation of octachlorotrisilane from monomeric chlorosilanes, by subjecting the chlorosilanes to a thermal plasma.
申请公布号
WO2014173574(A1)
申请公布日期
2014.10.30
申请号
WO2014EP54127
申请日期
2014.03.04
申请人
EVONIK DEGUSSA GMBH;LANG, JÜRGEN ERWIN;RAULEDER, HARTWIG;MÜH, EKKEHARD;MOUSSALLEM, IMAD
发明人
LANG, JÜRGEN ERWIN;RAULEDER, HARTWIG;MÜH, EKKEHARD;MOUSSALLEM, IMAD
