CANTILEVER, MANUFACTURING PROCESS, DETECTION DEVICE, AND DETECTION METHOD

摘要

In one exemplary embodiment, an x-ray target part (212) is embedded in the cantilever (210). In one exemplary embodiment of the cantilever (210), the x-ray target part (212) is embedded in a probe (211) of the cantilever (210). In one exemplary embodiment of the cantilever, the probe (211) of the cantilever (210) is formed of a material containing an element lighter than Si. In one exemplary embodiment, the cantilever (210) has a conducting layer (213) in a section thereof that excludes the irradiation axis of irradiation of x-rays from the x-ray target part (212).