| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a small optical deflector with high driving efficiency which can obtain a large amplitude, can reduce dynamic deformation, and can reduce fluctuation of resonance frequency due to a temperature rise. <P>SOLUTION: The optical deflector includes: a fixed base 50; a mirror portion 10 having a light reflecting surface; a pair of elastic support members 30a and 30b for swingably supporting the mirror portion 10 through an internal frame member 20; and a pair of drive beams 40a and 40b. The mirror portion 10, the internal frame member 20 and the pair of the elastic support members 30a and 30b are supported in a cantilever manner on a fixed base 40 by the pair of the drive beams 40a and 40b. The internal frame member 20 and the mirror portion 10 are connected with a plurality of connecting members 22 arranged radially around the center of the mirror portion 10, and the connecting members 22 are prevented from being arranged on the extension line of the connecting point between the pair of the elastic support members 30a and 30b and the internal frame member 20. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
