发明名称 |
Electron beam vapor deposition apparatus for depositing multi-layer coating |
摘要 |
<p>A physical vapor deposition apparatus (10) includes first and second chambers (12a,12b). A first directed vapor deposition crucible (30a) is at least partially within the first chamber (12a) for presenting a first source material (32a) to be deposited on a work piece. A second directed vapor deposition crucible (30b) is at least partially within the second chamber (12b) for presenting a second, different source material (32b) to be deposited on the work piece. At least one of the materials may be deposited as a coating.</p> |
申请公布号 |
EP2261387(B1) |
申请公布日期 |
2014.10.29 |
申请号 |
EP20100250652 |
申请日期 |
2010.03.30 |
申请人 |
UNITED TECHNOLOGIES CORPORATION |
发明人 |
NEAL, JAMES W. |
分类号 |
C23C14/30;C23C14/56;H01J37/16;H01J37/305;H01J37/317 |
主分类号 |
C23C14/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|