发明名称 Electron beam vapor deposition apparatus for depositing multi-layer coating
摘要 <p>A physical vapor deposition apparatus (10) includes first and second chambers (12a,12b). A first directed vapor deposition crucible (30a) is at least partially within the first chamber (12a) for presenting a first source material (32a) to be deposited on a work piece. A second directed vapor deposition crucible (30b) is at least partially within the second chamber (12b) for presenting a second, different source material (32b) to be deposited on the work piece. At least one of the materials may be deposited as a coating.</p>
申请公布号 EP2261387(B1) 申请公布日期 2014.10.29
申请号 EP20100250652 申请日期 2010.03.30
申请人 UNITED TECHNOLOGIES CORPORATION 发明人 NEAL, JAMES W.
分类号 C23C14/30;C23C14/56;H01J37/16;H01J37/305;H01J37/317 主分类号 C23C14/30
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