发明名称 |
BUFFERED STORAGE AND TRANSPORT DEVICE FOR TOOL UTILIZATION |
摘要 |
A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers. |
申请公布号 |
EP2449583(A4) |
申请公布日期 |
2014.10.29 |
申请号 |
EP20100805163 |
申请日期 |
2010.08.02 |
申请人 |
MURATA MACHINERY, LTD. |
发明人 |
FATULA, JR., JOSEPH, JOHN;DEYANOV, ROUMEN ILIEV;GONZALEZ, PABLO;CARLSON, ROBERT;GREENE, JOHN BROOKS;TZOU, KEVIN |
分类号 |
H01L21/677;B65G1/04;B65G49/06;B66C1/66;B66C11/06;B66C17/04 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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