发明名称 |
POLYCRYSTALLINE SILICON ROD AND METHOD FOR PRODUCING POLYSILICON |
摘要 |
Polycrystalline silicon rods produced by the Siemens process produce a higher yield of CZ crystals when the process parameters are modified in a second stage of deposition such that an outer layer of larger crystallites having a mean swize >20 μm is produced. Harvesting of these polycrystalline rods and conventional rods by enclosing them in a plastic bag or sheath prior to removal from the reactor also surprisingly increase the yield of CZ crystals grown from a melt containing the sheathed rods. |
申请公布号 |
EP2794477(A1) |
申请公布日期 |
2014.10.29 |
申请号 |
EP20120809687 |
申请日期 |
2012.12.12 |
申请人 |
WACKER CHEMIE AG |
发明人 |
SOFIN, MIKHAIL;DORNBERGER, ERICH;PECH, REINER |
分类号 |
C01B33/029;C01B33/035 |
主分类号 |
C01B33/029 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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