| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a plasma generation apparatus which generates a metal function material particle gas and supplies the generated metal functional material particle gas to the CVD chamber side. <P>SOLUTION: A plasma generation apparatus includes: an electrode cell and a housing enclosing the electrode cell. The electrode cell has: a first electrode 3; a discharge space 6; a second electrode 1; dielectric bodies 2a, 2b; and a through port PH formed at a center part when viewed in a plan view. An insulation cylindrical part 21, having a cylindrical shape, is disposed in the through port PH and has jet holes 21x at a side surface part of the insulation cylindrical part 21 having the cylindrical shape. Further, the plasma generation apparatus includes a conductive member disposed in a cavity part 21A of the insulation cylindrical part 21. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
