发明名称 |
AUTOMATIC X-RAY INSPECTION APPARATUS FOR SMT INLINE PROCESS |
摘要 |
<p>The invention relates to an automatic X-ray inspection apparatus for a SMT inline process, comprising: a stage unit for supporting an object to be inspected such that the object is attachable/detachable, the stage unit being movable on an X-axis and Y-axis in a plane and rotatable; an X-ray vacuum tube arranged beneath the stage unit so as to irradiate the object arranged on the stage unit with X-rays; and a detector arranged above the stage unit so as to swivel toward one side in order to detect X-rays transmitted through the object. The X-ray vacuum tube swivels in synchronization with the swiveling of the detector, and an X-ray emission surface of the X-ray vacuum tube is arranged so as to be parallel to the stage unit. The stage unit has a hollow shaft, and a hollow bearing that supports the hollow shaft such that the hollow shaft is rotatable.</p> |
申请公布号 |
EP2796862(A1) |
申请公布日期 |
2014.10.29 |
申请号 |
EP20120860408 |
申请日期 |
2012.12.21 |
申请人 |
SEC CO., LTD. |
发明人 |
KIM, JONG-HYUN;KIM, MAN-SEOK;RYU, KI-UNG;RYU, KI-JUN |
分类号 |
G01N23/04;G01B15/00 |
主分类号 |
G01N23/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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