| 摘要 |
<p>There are provided an optical non-destructive inspection apparatus and an optical non-destructive inspection method, which can inspect a measurement object such as a wire bonding portion in a broad measurable temperature range in a short time, with high reliability. The apparatus includes a focusing-collimating unit (10), a heating laser beam source (21), a heating laser beam guide unit, an infrared detector (33), an emitted-infrared guide unit, first and second correcting laser beam sources (22, 23), first and second correcting laser beam guide units, first and second correcting laser detectors (31, 32), first and second reflected laser beam guide units, and a control unit (50). The control unit (50) controls the heating laser beam source (21) and the first and second correcting laser beam sources (22, 23), measures a temperature rise characteristic that is a temperature rise state of a measurement spot (SP) based on a heating time, on the basis of a detection signal from the infrared detector (33) and detection signals from the first and second correcting laser detectors (31, 32), and determines a state of a measurement object (bonding structure (97)) based on the measured temperature rise characteristic.</p> |
