发明名称 搬送システム
摘要 <p>A transfer system according to an embodiment includes a plurality of robot hands, a storage unit, and an instructing part. The robot hands are operable to hold a thin sheet-like workpiece. The storage unit stores therein speed information that represents a temperature of the workpiece associated with a specified speed of a robot hand that holds the workpiece. The instructing part extracts the specified speed for each robot hand from the speed information and instructs to move all of the robot hands at or lower than a representative speed determined based on a set of extracted specified speed data.</p>
申请公布号 JP5614417(B2) 申请公布日期 2014.10.29
申请号 JP20120000828 申请日期 2012.01.05
申请人 发明人
分类号 H01L21/677;B25J13/00 主分类号 H01L21/677
代理机构 代理人
主权项
地址