Magnetic field applying sample holder; and charged particle beam apparatus using same

摘要

The disclosed invention provides a sample holder capable of reducing or preventing the influence of a charged particle beam 11 deflected by applying a magnetic field to a sample 201 and provided with means for simply switching between a mode of observing the sample while applying a magnetic field to the sample, and a mode free of a magnetic field in which a magnetic field becomes zero completely. The sample holder includes a magnetic field generating element 301 including three or more magnetic gaps 351-353 for applying a magnetic field to a sample, a cantilever-beam-shaped sample holding element 202 that holds the sample 201 on one end thereof, and a moving mechanism that adjusts a relative position between a sample and a magnetic gap. The magnetic gaps 351-353 can be placed along an optical axis of the charged particle beam 11.