APPARATUS AND METHOD FOR TRANSFERRING SUBSTRATE

摘要

The present invention relates to a substrate transferring apparatus and a substrate transferring method using the same, the apparatus including a support hand for supporting the substrate; an arm unit rotationally coupled to the support hand; an arm base rotationally coupled to the arm unit; and a driving part rotating the arm unit and the support hand for moving the support hand, wherein the driving part moves the support hand in a direction opposite to a meandering direction of the support hand in a process of moving the support hand. The present invention reduces substrate transferring time as well as prevents process costs from rising according to damage to or destruction of the support hand or the substrate supported by the support hand because of reducing a meandering degree and concurrently increasing a support hand moving speed while the support hand is moving, thereby enhancing productivity and yield rate of electronic parts.