<p>A microphone unit (2) includes: a microphone substrate (13); and a partition unit (20) having a diaphragm (22). The microphone substrate (13) has a first substrate opening (14) and a second substrate opening (15). The partition unit (20) covers the first substrate opening (14) and the diaphragm (22) covers a part of the first substrate opening (14) so as to form an internal space containing an in-substrate unit space (12) formed at least in the microphone substrate (13) and communicating with outside from the diaphragm (22) via the first substrate opening (14) and the second substrate opening (15). This realizes a microphone unit in which a differential microphone configured by a single diaphragm is mounted with a high density.</p>
申请公布号
EP2252075(A4)
申请公布日期
2014.10.29
申请号
EP20090708896
申请日期
2009.02.04
申请人
FUNAI ELECTRIC CO., LTD.;FUNAI ELECTRIC ADVANCED APPLIED TECHNOLOGY RESEARCH INSTITUTE INC.