发明名称 電界効果型トランジスタ、表示装置、センサ及び電界効果型トランジスタの製造方法
摘要 <p>A field effect transistor including: a gate insulating film; an oxide semiconductor layer that serves as an active layer and whose main structural elements are Sn, Zn and O, or Sn, Ga, Zn and O; and an oxide intermediate layer that is disposed between the gate insulating film and the oxide semiconductor layer, and whose resistivity is higher than that of the oxide semiconductor layer.</p>
申请公布号 JP5615744(B2) 申请公布日期 2014.10.29
申请号 JP20110055559 申请日期 2011.03.14
申请人 发明人
分类号 H01L29/786;G02F1/1368;H01L21/336;H01L27/144;H01L27/146;H01L51/50 主分类号 H01L29/786
代理机构 代理人
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