发明名称 |
Sensor with isolated diaphragm |
摘要 |
A sensor assembly includes a first wafer having a cavity formed therein and a second wafer bonded relative to the first wafer to form a diaphragm over the cavity. A trench is formed in the second wafer in or around the diaphragm and the trench may be filled with an isolating material to help thermally and/or electrically isolate the diaphragm. The diaphragm may support one or more sense elements. The sensor assembly may be used a flow sensor, a pressure sensor, a temperature sensor, and/or any other suitable sensor, as desired. |
申请公布号 |
EP2796846(A2) |
申请公布日期 |
2014.10.29 |
申请号 |
EP20140161850 |
申请日期 |
2014.03.26 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
STEWART, CARL;BECK, SCOTT E.;DAVIS, RICHARD A.;MORALES, GILBERTO |
分类号 |
G01L9/00;B81B3/00;B81B7/00;G01L7/08 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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