发明名称 |
METHOD AND APPARATUS FOR ADJUSTING RADIATION SPOT SIZE |
摘要 |
<p>An apparatus can include a first beam cropper configured to crop a portion of a radiation pulse having a first spot size to form an intermediate cropped radiation pulse having an intermediate cropped spot with an intermediate cropped spot size less than the first spot size; and a second beam cropper configured to crop the intermediate cropped spot to form a second cropped radiation pulse having a second cropped spot with a second cropped spot size less the intermediate cropped spot size.</p> |
申请公布号 |
EP2795283(A1) |
申请公布日期 |
2014.10.29 |
申请号 |
EP20120858924 |
申请日期 |
2012.11.01 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
O'CONNOR, CIARAN JOHN PATRICK;HILLIARD, SHANE;SUMERFIELD, LEIF |
分类号 |
G01N1/00;B23K26/06;G01N27/64;G02B5/00;G02B27/00 |
主分类号 |
G01N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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