发明名称 |
SENSOR FOR MEASURING SURFACE NON-UNIFORMITY |
摘要 |
<p>A method includes forming a two-dimensional interrogating beam on a selected sample region of a surface; collecting light transmitted through or reflected from the sample region with an array of lenses to form a sample array of focus spots; imaging the sample array of focus spots through an imaging lens on a sensor; and comparing an image of the sample array of focus spots to a reference array of focus spots to determine a level of non-uniformity in the sample region.</p> |
申请公布号 |
EP2795250(A1) |
申请公布日期 |
2014.10.29 |
申请号 |
EP20120860619 |
申请日期 |
2012.12.11 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
QIAO, YI;LAI, JACK W.;RIBNICK, EVAN J.;HOFELDT, DAVID L. |
分类号 |
G01B11/30;G01N21/86;G01N21/88;G01N21/89;G01N21/95 |
主分类号 |
G01B11/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|