发明名称 ADHESION METHOD OF PLATE-LIKE OBJECTS
摘要 <p>Provided is a method for bonding a plate-type object which makes it difficult to introduce bubbles between an adhesive and a plate-type object. The method for bonding a plate-type object on a sheet comprises the steps of: supplying an adhesive to one point on the sheet to form a mountain of the adhesive; bonding the plate-type object on the sheet through the adhesive by moving the plate-type object relatively to the sheet in a state in which an non-adhesion surface of the plate-type object faces the sheet after supply of the adhesive and pressing the plate-type object against the adhesive from the top of the mountain of the adhesive such that the adhesive is spread.</p>
申请公布号 KR20140125296(A) 申请公布日期 2014.10.28
申请号 KR20140040366 申请日期 2014.04.04
申请人 DISCO CORPORATION 发明人 ONO TAKASHI;ONODERA HIROSHI
分类号 H01L21/48;H01L21/304 主分类号 H01L21/48
代理机构 代理人
主权项
地址