Apparatus for fabricating display device

摘要

A fabrication apparatus of a display that is adaptive for improving reliability is disclosed. The fabrication apparatus of a display device includes a chamber for vacuum heating; a hot plate disposed on the inside of the chamber; a plurality of external pipes that are disposed on the outside of the chamber, and to which vent gas for converting the atmospheric pressure of the inside of the chamber, which is in a vacuum state, into the atmospheric pressure of the outside is supplied; a gas outlet tube, which is extended from the external pipe and disposed on the inner side surface of the chamber in order to discharge the vent gas; and a gas heating part which is disposed on each of the external pipe and heats up the vent gas supplied from the outside.

主权项

1. A fabrication apparatus of a display device comprising:
a chamber for vacuum heating; a plurality of hot plates disposed at an inside of the chamber and each including a bottom surface; a plurality of external pipes that are disposed at an outside of the chamber, and to which vent gas for converting an atmospheric pressure of the inside of the chamber, which is in a vacuum state, into the atmospheric pressure of the outside is supplied; an internal pipe extended from an external pipe and located at the inside of the chamber, and disposed under the bottom surface of an adjacent one of the hot plates; and a gas outlet pipe which is extended from the internal pipe and discharges the vent gas into the chamber, wherein the internal pipe has a plurality of bent portions disposed under the bottom surface of the adjacent one of the hot plates.