Thin film battery fabrication using laser shaping

摘要

A method of fabricating a battery comprises selecting a battery substrate having cleavage planes, and depositing on the battery substrate, one or more battery component films comprising electrode films that at least partially surround an electrolyte film. Pulsed laser beam bursts are applied to the battery component films at a sufficiently high power level to vaporize portions of the films to form shaped battery features. The pulsed laser bursts shape the films substantially without causing fractures along the cleavage planes of the battery substrate. Pulsed laser shaping can be used to replace the use of a mask in the fabrication of shaped battery components.

主权项

1. A method of fabricating a battery on a battery substrate, the method comprising:
(a) selecting a battery substrate having cleavage planes; (b) depositing one or more battery component films on the battery substrate, the battery component films comprising electrode films at least partially surrounding an electrolyte film, and at least one battery component film comprising a metal or metal compound; and (c) applying to the battery component film comprising the metal or metal compound, a plurality of pulsed laser beam bursts from an ultraviolet laser beam set at a power level of from about 0.2 to about 1 watt, the pulsed laser beam bursts having a duration of from about 40 to about 160 nanoseconds to vaporize a portion of the battery component film comprising the metal or metal compound substantially without causing fractures along the cleavage planes of the battery substrate.