MEMS particle sorting actuator and method of manufacturing

摘要

A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on one side of the axis of motion. The movable structure is actuated by a separate force-generating apparatus, which is entirely separate from the movable structure formed on its substrate. This allows the movable structure to be entirely submerged in the sample fluid.

主权项

1. A microfabricated particle sorting actuator capable of motion and fabricated on a layer of a substrate, comprising:
a plurality of microfabricated fluidic channels formed in a plane of the layer of the substrate; and a movable structure formed in and from the layer of the substrate with a motion substantially in the plane, acted on by a magnetic force substantially in the same plane and wherein the movable structure simultaneously opens a first microfabricated fluidic channel which is in the plane and closes a second microfabricated fluidic channel also in the plane wherein the motion is substantially rotary, and the movable structure is attached to the substrate at one or more fixed points, and further comprising one or more flexible springs attached to the one or more fixed points, which return the movable structure to a first position when the force is removed.