发明名称 |
System and method for pressure compensation in a pump |
摘要 |
Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated. |
申请公布号 |
US8870548(B2) |
申请公布日期 |
2014.10.28 |
申请号 |
US201113251976 |
申请日期 |
2011.10.03 |
申请人 |
Entegris, Inc. |
发明人 |
Cedrone James;Gonnella George L. |
分类号 |
F04B13/00;F04B49/06;F04B51/00 |
主分类号 |
F04B13/00 |
代理机构 |
Sprinkle IP Law Group |
代理人 |
Sprinkle IP Law Group |
主权项 |
1. A system, comprising:
a pumping apparatus comprising a chamber for receiving a fluid for dispense, a pump within the chamber and a sensor to sense a pressure in the chamber; and a controller configured to receive the pressure of the fluid in the chamber of the pumping apparatus from the sensor, determine if the pressure in the chamber is above a desired pressure, move the pump of the pumping apparatus to increase the volume of the chamber to compensate for a pressure increase if the pressure in the chamber is above the desired pressure, and send a signal to the pump to dispense fluid from the chamber, wherein the determination and movement are repeated to maintain substantially the desired pressure until the dispense of fluid is initiated. |
地址 |
Billerica MA US |