发明名称 System and method for pressure compensation in a pump
摘要 Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated.
申请公布号 US8870548(B2) 申请公布日期 2014.10.28
申请号 US201113251976 申请日期 2011.10.03
申请人 Entegris, Inc. 发明人 Cedrone James;Gonnella George L.
分类号 F04B13/00;F04B49/06;F04B51/00 主分类号 F04B13/00
代理机构 Sprinkle IP Law Group 代理人 Sprinkle IP Law Group
主权项 1. A system, comprising: a pumping apparatus comprising a chamber for receiving a fluid for dispense, a pump within the chamber and a sensor to sense a pressure in the chamber; and a controller configured to receive the pressure of the fluid in the chamber of the pumping apparatus from the sensor, determine if the pressure in the chamber is above a desired pressure, move the pump of the pumping apparatus to increase the volume of the chamber to compensate for a pressure increase if the pressure in the chamber is above the desired pressure, and send a signal to the pump to dispense fluid from the chamber, wherein the determination and movement are repeated to maintain substantially the desired pressure until the dispense of fluid is initiated.
地址 Billerica MA US