Methods and apparatus for marangoni substrate drying using a vapor knife manifold

摘要

The present invention provides methods and apparatus for a Marangoni vapor knife assembly. The assembly includes a base having a channel extending longitudinally through the base and a plurality of passages extending laterally from the channel toward an outer face of the base; a top plate adapted to be removeably coupled to the base with an outer face flush with the outer face of the base; and a shim adapted to be disposed between the base and the top plate and further adapted to form a plurality of spray orifices in the assembly. Numerous additional features are disclosed.

主权项

1. A Marangoni vapor knife assembly comprising:
a base having a channel extending longitudinally through the base and a plurality of passages extending laterally from the channel toward an outer face of the base; a top plate removeably coupled to the base with an outer face flush with the outer face of the base; and a shim disposed between the base and the top plate that forms a plurality of spray orifices in the assembly.