Complementary stress memorization technique layer method

摘要

A process of forming a CMOS integrated circuit by forming a first stressor layer over two MOS transistors of opposite polarity, removing a portion of the first stressor layer from the first transistor, and forming a second stressor layer over the two transistors. A source/drain anneal is performed, crystallizing amorphous regions of silicon in the gates of the two transistors, and subsequently removing the stressor layers. A process of forming a CMOS integrated circuit by forming two transistors of opposite polarity, forming a two stressor layers over the transistors, annealing the integrated circuit, removing the stressor layers, and siliciding the transistors. A process of forming a CMOS integrated circuit with an NMOS transistor and a PMOS transistor using a stress memorization technique, by removing the stressor layers with wet etch processes.

主权项

1. A process of forming a complementary metal oxide semiconductor (CMOS) integrated circuit, comprising steps:
providing a semiconductor substrate; providing a first polarity MOS transistor formed in and on said substrate, said first polarity MOS transistor being an NMOS transistor, including:
a first gate dielectric layer formed on a top surface of said substrate;a first MOS gate formed on a top surface of said first gate dielectric layer, said first MOS gate including silicon, in which a top portion of silicon which is amorphized to some degree;first gate sidewall spacers formed on vertical surfaces of said first MOS gate; andfirst source/drain implanted region formed in said substrate adjacent to said first MOS gate; providing a second polarity MOS transistor formed in and on said substrate in an area separate from said first polarity MOS transistor, said second polarity MOS transistor being a PMOS transistor, including:
a second gate dielectric layer formed on a top surface of said substrate;a second MOS gate formed on a top surface of said second gate dielectric layer, said second MOS gate including silicon, in which a top portion of silicon which is amorphized to some degree;second gate sidewall spacers formed on vertical surfaces of said second MOS gate; andsecond source/drain implanted region formed in said substrate adjacent to said second MOS gate; forming a first stressor layer of silicon nitride over said first polarity MOS transistor and said second polarity MOS transistor, said first stressor layer having a tensile stress level between 1×1010 dynes/sq.cm and 3×1010 dynes/sq.cm, and having a thickness between 55 and 65 nanometers; removing a portion of said first stressor layer from over said second polarity MOS transistor using an aqueous phosphoric acid solution so that between one fourth and one half of said first stressor layer remains over said second polarity MOS transistor; forming a second stressor layer over said first polarity MOS transistor and said second polarity MOS transistor, said second stressor layer having a compressive stress level between 1×1010 dynes/sq.cm and 3×1010 dynes/sq.cm, a ratio of Si—H bonds to N—H bonds greater than 7, and a thickness between 15 and 25 nanometers; with said first stressor layer over the first MOS gate and said second stressor layer over both the first MOS gate and the second MOS gate, performing an anneal operation on said CMOS integrated circuit using a scanning laser anneal tool, such that:
said CMOS integrated circuit is heated to a temperature between 1250 C and 1350 C for a time between 10 microseconds and 1 millisecond so that:lattice damage in said first source/drain implanted regions is repaired;lattice damage in said second source/drain implanted regions is repaired;said top portion of said first MOS gate is crystallized; andsaid top portion of said second MOS gate is crystallized; removing said first stressor layer and said second stressor layer from over said first polarity MOS transistor and said second polarity MOS transistor using an aqueous phosphoric acid solution.