Free layers with iron interfacial layer and oxide cap for high perpendicular anisotropy energy density

摘要

A mechanism is provided for a spin torque transfer random access memory device. A tunnel barrier is disposed on a reference layer, and a free layer is disposed on the tunnel barrier. The free layer includes an iron layer as a top part of the free layer. A metal oxide layer is disposed on the iron layer, and a cap layer is disposed on the metal oxide layer.

主权项

1. A method of forming a spin torque transfer random access memory device, the method comprising:
disposing a tunnel barrier on a reference layer; disposing a free layer on the tunnel barrier; wherein the free layer includes an iron layer as a top part of the free layer; disposing a metal oxide layer on the iron layer; and disposing a cap layer on the metal oxide layer, wherein the free layer includes a first magnetic layer disposed on the tunnel barrier, a spacer layer disposed on the first magnetic layer, a second magnetic layer disposed on the spacer layer, and the iron layer is disposed on the second magnetic layer and wherein the magnetic layer is separate and distinct from the iron layer.