(Amide amino alkane) metal compound, method of manufacturing metal-containing thin film using said metal compound

摘要

The present invention relates to an (amide amino alkane) metal compound represented by the formula (1):;
wherein
M represents a metal atom;R1 represents a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms;R2 and R3 may be the same as, or different from each other, and each independently represents a linear or branched alkyl group having 1 to 3 carbon atoms, or R2 and R3 may form a substituted or unsubstituted 5- or 6-membered ring together with the nitrogen atom to which they are bound;Z represents a linear or branched alkylene group having 1 to 10 carbon atoms (a part of which may optionally form a ring); andn represents a number of the ligands, which is equal to the valence of the metal (M), and represents an integer of from 1 to 3;

with the proviso that
the metal compounds in which M is Li (Lithium), Be (Beryllium), Ge (Germanium) or Nd (Neodymium) are excluded;the metal compounds in which M is Mg (Magnesium) and R1 is methyl group are excluded;the metal compounds in which M is Zn (Zinc) and R1 is methyl group are excluded;the metal compounds in which M is Bi (Bismuth) and R1 is t-butyl group are excluded; andin cases where n is two or greater, two or more ligands may be the same as, or different from each other;

and a method of producing a metal-containing thin film using the metal compound.

主权项

1. An (amide amino alkane) metal compound represented by the formula (1);wherein
M represents a metal atom; R1 represents a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms; R2 and R3 may be the same as, or different from each other, and each independently represents a linear or branched alkyl group having 1 to 3 carbon atoms, or R2 and R3 may form a substituted or unsubstituted 5- or 6-membered ring together with the nitrogen atom to which they are bound; Z represents a linear or branched alkylene group having 1 to 10 carbon atoms (a part of which may optionally form a ring); and n represents a number of the ligands, which is equal to the valence of the metal (M), and represents an integer of from 1 to 3;with the proviso that
the metal compounds in which M is Li (Lithium), Be (Beryllium), Ge (Germanium) or Nd (Neodymium) are excluded; the metal compounds in which M is Mg (Magnesium) and R1 is methyl group are excluded; the metal compounds in which M is Zn (Zinc) and R1 is methyl group are excluded; the metal compounds in which M is Bi (Bismuth) and R1 is t-butyl group are excluded; and in cases where n is two or greater, two or more ligands may be the same as, or different from each other.