SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

摘要

An error in the detection value of a pressure sensor can be prevented when an environmental temperature is changed. A semiconductor substrate (SUB) is a first conductivity-type semiconductor substrate. A semiconductor layer (EPI) is formed on the first surface of the semiconductor substrate (SUB). Resistance parts (RES) have second conductivity types and are formed in the semiconductor layer (EPI). The resistance parts (RES) are separated from each other. A separation region (SEP) is a first conductivity-type region formed on the semiconductor layer (EPI) and electrically separates the resistance parts (RES). A depressed part (DEP) is formed on the second surface of the semiconductor substrate (SUB) and is overlapped with the resistance parts (RES) when viewed from parallel. Also, the semiconductor layer (EPI) is an epitaxial layer.