Optical probing system having reliable temperature control

摘要

An optical probe system for probing an electronic device includes a sample plate that can hold a target device comprising an integrated circuit, an optical objective system that can collect reflected or emitted light from the integrated circuit in the target device, and a temperature control chamber that can hold a fluid to control the temperature of the target device.

主权项

1. An optical probe system for probing an electronic device, comprising:
a sample plate configured to hold a target device comprising an integrated circuit; an optical objective system configured to collect reflected or emitted light from the integrated circuit in the target device; and a temperature control chamber configured to hold a fluid to control temperature of the target device, comprising:
an outer chamber wall comprising an upper rim defining an upper opening and a lower rim defining a lower opening, wherein the temperature control chamber is configured to be pressed towards the sample plate to form a seal to the fluid at the upper rim;a seal head comprising a top portion having an inner opening formed therein, wherein the inner opening in the top portion of the seal head allows the optical objective system to be pushed there through;a pair of elastic members which form two nested closed loops defining a space therein, wherein the pair of elastic members are configured to be compressed when the optical objective system is pushed up against the top portion; anda vacuum system configured to exhaust air from the space between the pair of elastic members, wherein a sealing to the fluid is formed between the optical objective system and the top portion of the seal head when the air pressure drops below a predetermined value, wherein the outer chamber wall, the seal head, and at least a portion of the target device form at least part of an enclosure for the fluid.