| 发明名称 | Target supply device | ||
| 摘要 | A target supply device according to an aspect of the present disclosure may include a target generator having a holding space and a first through-hole that communicates with the holding space, a porous filter having a thermal expansion coefficient that is substantially the same as a thermal expansion coefficient of the target generator, and a holder portion having a thermal expansion coefficient that is substantially the same as the thermal expansion coefficient of the target generator, that is configured to hold the porous filter and that is provided so as to form a seal against an inner surface of the target generator. | ||
| 申请公布号 | US8872145(B2) | 申请公布日期 | 2014.10.28 |
| 申请号 | US201414174673 | 申请日期 | 2014.02.06 |
| 申请人 | Gigaphoton Inc. | 发明人 | Hirashita Toshiyuki;Nishisaka Toshihiro |
| 分类号 | G21K5/08 | 主分类号 | G21K5/08 |
| 代理机构 | McDermott Will & Emery LLP | 代理人 | McDermott Will & Emery LLP |
| 主权项 | 1. A target supply device comprising: a target generator having a holding space and a first through-hole that communicates with the holding space; a porous filter having a thermal expansion coefficient that is substantially the same as a thermal expansion coefficient of the target generator; and a holder portion, having a thermal expansion coefficient that is substantially the same as the thermal expansion coefficient of the target generator, configured to hold the porous filter and provided so as to form a seal against an inner surface of the target generator. | ||
| 地址 | Tochigi JP | ||