| 摘要 |
<p>PURPOSE: A light emitting diode manufacturing deposition equipment is provided to use a scan type deposition equipment in which a substrate or source is deposited by moving, thereby reducing the size of the deposition equipment. CONSTITUTION: A chamber comprises an internal space. A substrate support is located in an upper side of the chamber and supports the substrate. A first crucible(222) is located in a lower side of the chamber, comprises a first source, and is perpendicular to the substrate. A second crucible(224) is located in one side of the first crucible in a lower side of the chamber, comprises a second source and is inclined as much as a first angle to the substrate. A third crucible(226) is located in the other side of the first crucible in a lower side of the chamber, comprises a third source, and is inclined as much as a second angle to the substrate.</p> |
