Comprehensive analysis of queue times in microelectronic manufacturing

摘要

A system for determining a group of semiconductor manufacturing process steps with a similar influence on individual semiconductor products. The system generates a first table including time stamps for the individual semiconductor products. The system creates a second table including Q-times based on the first table. The Q-times refers to time differences between every pair of the time stamps. The system forms a dependency table by grouping the Q-times with similar dependencies together. The system identifies groups of the similar dependencies. The system extracts semiconductor process steps belonging to the groups.

主权项

1. A system for determining a group of semiconductor manufacturing process steps that have a similar influence on individual semiconductor products, the system comprising:
a memory device; and a processor being connected to the memory device, wherein the processor performs steps of:
obtaining a first table including time stamps of the manufacturing process steps for the individual semiconductor products;creating a second table including Q-times based on the first table, the Q-times referring to time differences between every pair of the time stamps;forming a dependency table by grouping the Q-times with similar dependencies together;identifying groups of the similar dependencies; andextracting semiconductor process steps belonging to the groups.