Inspection apparatus and inspection method

摘要

A technology of inspecting a photoexcited carrier generation area of a photo device in a non-contact manner is provided. An inspection apparatus inspects a photovoltaic cell panel in which the photo device is formed. The inspection apparatus includes an irradiation part that irradiates the photovoltaic cell panel with pulsed light from a light receiving surface side and a detecting part (detector) that detects electric field intensity of a terahertz wave pulse, which is generated according to the irradiation of the pulsed light.

主权项

1. An inspection apparatus that inspects a photo device, said inspection apparatus comprising:
an irradiation part that irradiates said photo device with pulsed light; and a detecting part that detects an electromagnetic wave pulse, which is generated by said photo device according to said pulsed light irradiation, wherein said detecting part includes: a detector that detects electric field intensity of said electromagnetic wave pulse according to irradiation of probe light emitted from a light source of said pulsed light; and a delaying part that delays detection timing at which said detector detects said electromagnetic wave pulse by changing a temporal difference between a time said electromagnetic wave pulse reaches said detector and a time said probe light reaches said detecting part, the inspection apparatus further comprising a time waveform constructing part that constructs a time waveform from electromagnetic wave intensity of an electromagnetic pulse detected by the detector at said plurality of pieces of detection timing.