| 主权项 |
1. A process for continuously producing monosilane in a monosilane production apparatus comprising a reaction column (1), at least two upper condensers (3, 5) each of which has a reflux feed pipe (6, 7) serially connected to a top portion of the reaction column (1), a bottom reboiler (8) of the reaction column (1), and an evaporation tank (14) connected to a bottom portion (13) of the reaction column (1); the process comprising:
a) supplying dichlorosilane or a mixture of tetrachlorosilane, trichlorosilane, dichlorosilane, and monochlorosilane, wherein the ratio of the number of total hydrogen atoms to the number of total chlorine atoms (H/Cl) is in the range from 0.6 to 3, to a region (2) higher than 70% of the column (1) in height via an upper feed injection point (9); b) supplying a catalyst to said upper stage (2) of the reaction column (1) via a lower injection point (10); c) introducing a resultant mixture containing monosilane, monochlorosilane, dichlorosilane, and trichlorosilane from the top portion of the reaction column (1) to the plurality of upper condensers (3, 5); d) separating monosilane from condensates containing monochlorosilane, dichlorosilane, and trichlorosilane in the upper condensers (3, 5); e) recycling the condensates after separating monosilane, through the reflux feed pipes (6, 7) to the upper stage (2) of the reaction column (1); f) bringing the condensates into contact with the catalyst in the reaction column;characterized in that wherein a monosilane rich gas, having monosilane as the largest component on a molar basis relative to monochlorosilane, dichlorosilane, and trichlorosilane, is produced via a pipe (27) connected downstream of the upper condensers; and wherein said catalyst is at least one of a tertiary aliphatic hydrocarbon-substituted amine and a tertiary aliphatic hydrocarbon-substituted amine hydrochloride; and wherein said monosilane rich gas, produced via a pipe (27) connected downstream of the upper condensers, comprises more than 60% of monosilane. |
