Port door positioning apparatus and associated methods

摘要

A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.

主权项

1. A loadport, comprising:
a port door having a front surface, a back surface, a top surface, a bottom surface, and first and second vertical side surfaces each extending between the top and bottom surfaces, wherein the front surface of the port door is defined to interface with a container door of a container for holding semiconductor workpieces, when present; a frame defined to have an opening through which the port door interfaces with the container door; a positioning device connected to the port door to provide for controlled positioning and movement of the port door; a movable closure mechanism affixed to the back surface of the port door between the top and bottom surfaces of the port door the movable closure mechanism positioned separate from the positioning device, the movable closure mechanism including moveable portions extending outward in a horizontal direction beyond each of the first and second vertical side surfaces of the port door, the moveable portions of the movable closure mechanism defined to be movable in a controlled manner relative to both the port door and the frame; and stationary closure mechanisms disposed on the frame proximate to the opening of the frame at locations to engage with the moveable portions of the movable closure mechanism when the port door is present within the opening of the frame, wherein movement of the moveable portions of the movable closure mechanism to respectively engage with the stationary closure mechanisms applies a closing force between the front surface of the port door and the container door.