| 摘要 |
The present invention relates to a cleaning apparatus cleaning a processed object. The cleaning apparatus includes a cleaning member located below a processed object to clean the processed object; a pressing unit located above the processed object, and lifted and lowered to press the processed object; a support unit supporting the processed object and the cleaning member at an upper portion, and having a pressure measurement unit measuring pressure of the pressing unit pressing the processed object; and a pressing control unit comparing the pressure value measured by the pressure measurement unit with reference pressure to control the lifting and lowering of the pressing unit in order to control the pressure applied to the processed object. Therefore, according to the present invention, the pressure of pressing the processed object toward the cleaning member is measured using the pressing unit, and the pressing control unit compares the actual measured pressure with the reference pressure. Also, by controlling the lifting and lowering of the pressing unit, the pressure applied to the cleaning member from the processed object is controlled to be the reference pressure, which is the pressure enabling efficient cleaning. Therefore, the cleaning force and the cleaning effect of the processed object can be improved, and constant cleaning force can be provided. |
