| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and an inspection device of a contact probe capable of enhancing the detection accuracy of a foreign matter adhering to the contact probe.SOLUTION: An inspection method of a contact probe includes a step for bringing a foreign matter inspection terminal 10 having, at the tip thereof, a fitting portion to be fitted to the tip of a contact probe 24, and the tip of a contact probe close to each other, and fitting the fitting portion to the tip of a contact probe, and a step for measuring the contact resistance of the fitting portion and the tip of a contact probe, in a resistance measuring section 20 having one end connected electrically with the foreign matter inspection terminal and the other end connected electrically with the contact probe. |
